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1 Ergebnisse
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Plasma Enhanced Chemical Vapor Deposition of Conformal GeTe..:
Gourvest, Emmanuel
;
Vallée, Christophe
;
Michallon, Philippe
...
ECS Journal of Solid State Science and Technology. 1 (2012) 6 - p. Q119-Q122 , 2012
Link:
https://doi.org/10.1149/2.017206jss
RT Journal T1 <Title>Plasma Enhanced Chemical Vapor Deposition of Conformal GeTe Layer for Phase Change Memory Applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.017206jss&Exemplar=1&LAN=DE A1 Gourvest, Emmanuel A1 Vallée, Christophe A1 Michallon, Philippe A1 Blanc, Romuald A1 Tiron, Raluca A1 Jourde, Dominique A1 Lhostis, Sandrine A1 Maitrejean, Sylvain PB The Electrochemical Society YR 2012 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 1 IS 6 SP Q119 OP Q122 LK http://dx.doi.org/https://doi.org/10.1149/2.017206jss DO https://doi.org/10.1149/2.017206jss SF ELIB - SuUB Bremen
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