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1 Ergebnisse
1
Communication—Defect-Free Filling of High Aspect Ratio Thro..:
Chang, Yiu-Hsiang
;
Tseng, Pei-Lien
;
Lin, Jen-Chieh
...
Journal of The Electrochemical Society. 166 (2018) 1 - p. D3155-D3157 , 2018
Link:
https://doi.org/10.1149/2.0181901jes
RT Journal T1 <Title>Communication—Defect-Free Filling of High Aspect Ratio Through Vias in Ultrathin Glass</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0181901jes&Exemplar=1&LAN=DE A1 Chang, Yiu-Hsiang A1 Tseng, Pei-Lien A1 Lin, Jen-Chieh A1 Chen, Jie-Chi A1 Huang, Meng-Chi A1 Lin, Hung-Yi A1 Pollard, Scott A1 Mazumder, Prantik PB The Electrochemical Society YR 2018 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 166 IS 1 SP D3155 OP D3157 LK http://dx.doi.org/https://doi.org/10.1149/2.0181901jes DO https://doi.org/10.1149/2.0181901jes SF ELIB - SuUB Bremen
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