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1 Ergebnisse
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Review—On Atomic Layer Deposition: Current Progress and Fut..:
Mallick, Bikash Chandra
;
Hsieh, Chien-Te
;
Yin, Ken-Ming
..
ECS Journal of Solid State Science and Technology. 8 (2019) 4 - p. N55-N78 , 2019
Link:
https://doi.org/10.1149/2.0201903jss
RT Journal T1 <Title>Review—On Atomic Layer Deposition: Current Progress and Future Challenges</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0201903jss&Exemplar=1&LAN=DE A1 Mallick, Bikash Chandra A1 Hsieh, Chien-Te A1 Yin, Ken-Ming A1 Gandomi, Yasser Ashraf A1 Huang, Kuan-Tsae PB The Electrochemical Society YR 2019 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 8 IS 4 SP N55 OP N78 LK http://dx.doi.org/https://doi.org/10.1149/2.0201903jss DO https://doi.org/10.1149/2.0201903jss SF ELIB - SuUB Bremen
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