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Improvements in Stribeck Curves for Copper and Tungsten Che..:
Bahr, Matthew
;
Sampurno, Yasa
;
Han, Ruochen
.
ECS Journal of Solid State Science and Technology. 6 (2017) 5 - p. P290-P295 , 2017
Link:
https://doi.org/10.1149/2.0241705jss
RT Journal T1 <Title>Improvements in Stribeck Curves for Copper and Tungsten Chemical Mechanical Planarization on Soft Pads</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0241705jss&Exemplar=1&LAN=DE A1 Bahr, Matthew A1 Sampurno, Yasa A1 Han, Ruochen A1 Philipossian, Ara PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 5 SP P290 OP P295 LK http://dx.doi.org/https://doi.org/10.1149/2.0241705jss DO https://doi.org/10.1149/2.0241705jss SF ELIB - SuUB Bremen
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