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1 Ergebnisse
1
Effects of Oxygen, Nitrogen and Fluorine on the Crystallini..:
Yang, Mengdi
;
Aarnink, Antonius A. I.
;
Wolters, Rob A. M.
..
ECS Journal of Solid State Science and Technology. 6 (2017) 12 - p. P839-P844 , 2017
Link:
https://doi.org/10.1149/2.0241712jss
RT Journal T1 <Title>Effects of Oxygen, Nitrogen and Fluorine on the Crystallinity of Tungsten by Hot-Wire Assisted ALD</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0241712jss&Exemplar=1&LAN=DE A1 Yang, Mengdi A1 Aarnink, Antonius A. I. A1 Wolters, Rob A. M. A1 Schmitz, Jurriaan A1 Kovalgin, Alexey Y. PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 12 SP P839 OP P844 LK http://dx.doi.org/https://doi.org/10.1149/2.0241712jss DO https://doi.org/10.1149/2.0241712jss SF ELIB - SuUB Bremen
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