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Method for Determining Stability of CMP Slurry:
Khanna, Aniruddh J.
;
Gupta, Sushant
;
Kumar, Purushottam
..
ECS Journal of Solid State Science and Technology. 7 (2018) 8 - p. P423-P428 , 2018
Link:
https://doi.org/10.1149/2.0241808jss
RT Journal T1 <Title>Method for Determining Stability of CMP Slurry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0241808jss&Exemplar=1&LAN=DE A1 Khanna, Aniruddh J. A1 Gupta, Sushant A1 Kumar, Purushottam A1 Chang, Feng-Chi A1 Singh, Rajiv K. PB The Electrochemical Society YR 2018 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 7 IS 8 SP P423 OP P428 LK http://dx.doi.org/https://doi.org/10.1149/2.0241808jss DO https://doi.org/10.1149/2.0241808jss SF ELIB - SuUB Bremen
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