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Surface Planarization of GaN-on-Sapphire Template by Chemic..:
Aida, Hideo
;
Kim, Seong-woo
;
Suzuki, Toshimasa
...
ECS Journal of Solid State Science and Technology. 3 (2014) 5 - p. P163-P168 , 2014
Link:
https://doi.org/10.1149/2.025405jss
RT Journal T1 <Title>Surface Planarization of GaN-on-Sapphire Template by Chemical Mechanical Polishing for Subsequent GaN Homoepitaxy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.025405jss&Exemplar=1&LAN=DE A1 Aida, Hideo A1 Kim, Seong-woo A1 Suzuki, Toshimasa A1 Koyama, Koji A1 Aota, Natsuko A1 Doi, Toshiro A1 Yamazaki, Tsutomu PB The Electrochemical Society YR 2014 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 3 IS 5 SP P163 OP P168 LK http://dx.doi.org/https://doi.org/10.1149/2.025405jss DO https://doi.org/10.1149/2.025405jss SF ELIB - SuUB Bremen
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