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1 Ergebnisse
1
Unexpectedly High Etching Rate of Highly Doped n-Type Cryst..:
Liu, L.
;
Lin, F.
;
Heinrich, M.
..
ECS Journal of Solid State Science and Technology. 2 (2013) 9 - p. P380-P383 , 2013
Link:
https://doi.org/10.1149/2.026309jss
RT Journal T1 <Title>Unexpectedly High Etching Rate of Highly Doped n-Type Crystalline Silicon in Hydrofluoric Acid</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.026309jss&Exemplar=1&LAN=DE A1 Liu, L. A1 Lin, F. A1 Heinrich, M. A1 Aberle, A. G. A1 Hoex, B. PB The Electrochemical Society YR 2013 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 2 IS 9 SP P380 OP P383 LK http://dx.doi.org/https://doi.org/10.1149/2.026309jss DO https://doi.org/10.1149/2.026309jss SF ELIB - SuUB Bremen
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