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Mechanistic Understanding of Low κ Organosilicate Glass Fil..:
Mallikarjunan, Anupama
;
Achtyl, Jennifer
;
Yang, Rung-Je
...
ECS Journal of Solid State Science and Technology. 8 (2019) 5 - p. P3185-P3189 , 2019
Link:
https://doi.org/10.1149/2.0271905jss
RT Journal T1 <Title>Mechanistic Understanding of Low κ Organosilicate Glass Film Planarization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0271905jss&Exemplar=1&LAN=DE A1 Mallikarjunan, Anupama A1 Achtyl, Jennifer A1 Yang, Rung-Je A1 Huang, Chen-Yuan A1 Chao, Shih-Hsuan A1 Gan, Lu A1 Tamboli, Dnyanesh A1 Ridgeway, Robert A1 Schlueter, James A1 Tsai, Ming-Shih A1 Li, Chris A1 O'Neill, Mark PB The Electrochemical Society YR 2019 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 8 IS 5 SP P3185 OP P3189 LK http://dx.doi.org/https://doi.org/10.1149/2.0271905jss DO https://doi.org/10.1149/2.0271905jss SF ELIB - SuUB Bremen
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