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Insights into Tungsten Chemical Mechanical Planarization: P..:
Mariscal, Juan Cristobal
;
McAllister, Jeffrey
;
Sampurno, Yasa
...
ECS Journal of Solid State Science and Technology. 8 (2019) 5 - p. P3190-P3194 , 2019
Link:
https://doi.org/10.1149/2.0281905jss
RT Journal T1 <Title>Insights into Tungsten Chemical Mechanical Planarization: Part III. Mini-Marathons and Associated Numerical Simulations</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0281905jss&Exemplar=1&LAN=DE A1 Mariscal, Juan Cristobal A1 McAllister, Jeffrey A1 Sampurno, Yasa A1 Suarez, Jon Sierra A1 Borucki, Leonard A1 Philipossian, Ara PB The Electrochemical Society YR 2019 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 8 IS 5 SP P3190 OP P3194 LK http://dx.doi.org/https://doi.org/10.1149/2.0281905jss DO https://doi.org/10.1149/2.0281905jss SF ELIB - SuUB Bremen
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