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1 Ergebnisse
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On the Manifestation of Ge Pre-Amorphization Implantation (..:
Mao, Shu-Juan
;
Xu, Jing
;
Wang, Gui-Lei
...
ECS Journal of Solid State Science and Technology. 6 (2017) 9 - p. P660-P664 , 2017
Link:
https://doi.org/10.1149/2.0321709jss
RT Journal T1 <Title>On the Manifestation of Ge Pre-Amorphization Implantation (PAI) in Forming Ultrathin TiSixfor Ti Direct Contact on Si in Sub-16/14 nm Complementary Metal-Oxide-Semiconductor (CMOS) Technology Nodes</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0321709jss&Exemplar=1&LAN=DE A1 Mao, Shu-Juan A1 Xu, Jing A1 Wang, Gui-Lei A1 Luo, Jun A1 Duan, Ning-Yuan A1 Simoen, Eddy A1 Radamson, Henry A1 Wang, Wen-Wu A1 Chen, Da-Peng A1 Li, Jun-Feng A1 Zhao, Chao A1 Ye, Tian-Chun PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 9 SP P660 OP P664 LK http://dx.doi.org/https://doi.org/10.1149/2.0321709jss DO https://doi.org/10.1149/2.0321709jss SF ELIB - SuUB Bremen
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