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1 Ergebnisse
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Editors' Choice—Efficiency of a CMP Pad at Removing Protect..:
Choi, Seungchoun
;
Doyle, Fiona M.
;
Dornfeld, David A.
ECS Journal of Solid State Science and Technology. 6 (2017) 4 - p. P187-P196 , 2017
Link:
https://doi.org/10.1149/2.0351704jss
RT Journal T1 <Title>Editors' Choice—Efficiency of a CMP Pad at Removing Protective Material from Copper during CMP</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0351704jss&Exemplar=1&LAN=DE A1 Choi, Seungchoun A1 Doyle, Fiona M. A1 Dornfeld, David A. PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 4 SP P187 OP P196 LK http://dx.doi.org/https://doi.org/10.1149/2.0351704jss DO https://doi.org/10.1149/2.0351704jss SF ELIB - SuUB Bremen
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