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1 Ergebnisse
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Effect of Conditioning and Slurry Application Method on Sil..:
Han, Ruochen
;
Sampurno, Yasa
;
Bahr, Matthew
..
ECS Journal of Solid State Science and Technology. 6 (2017) 7 - p. P477-P482 , 2017
Link:
https://doi.org/10.1149/2.0371707jss
RT Journal T1 <Title>Effect of Conditioning and Slurry Application Method on Silicon Dioxide Removal Rates Using a Ceria-Based Chemical Mechanical Planarization Slurry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0371707jss&Exemplar=1&LAN=DE A1 Han, Ruochen A1 Sampurno, Yasa A1 Bahr, Matthew A1 Borucki, Leonard A1 Philipossian, Ara PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 7 SP P477 OP P482 LK http://dx.doi.org/https://doi.org/10.1149/2.0371707jss DO https://doi.org/10.1149/2.0371707jss SF ELIB - SuUB Bremen
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