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1 Ergebnisse
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A Microreplicated Pad for Tungsten Chemical-Mechanical Plan..:
Tseng, Wei-Tsu
;
Mohan, Kaushik
;
Hull, Ricky
...
ECS Journal of Solid State Science and Technology. 5 (2016) 9 - p. P546-P552 , 2016
Link:
https://doi.org/10.1149/2.0391609jss
RT Journal T1 <Title>A Microreplicated Pad for Tungsten Chemical-Mechanical Planarization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0391609jss&Exemplar=1&LAN=DE A1 Tseng, Wei-Tsu A1 Mohan, Kaushik A1 Hull, Ricky A1 Hagan, James A1 Truong, Connie A1 Lehuu, Duy K. A1 Muradian, David PB The Electrochemical Society YR 2016 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 5 IS 9 SP P546 OP P552 LK http://dx.doi.org/https://doi.org/10.1149/2.0391609jss DO https://doi.org/10.1149/2.0391609jss SF ELIB - SuUB Bremen
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