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1 Ergebnisse
1
BEOL Cu CMP Process Evaluation for Advanced Technology Node:
Tanwar, Kunaljeet
;
Canaperi, Donald
;
Lofaro, Michael
...
Journal of The Electrochemical Society. 160 (2013) 12 - p. D3247-D3254 , 2013
Link:
https://doi.org/10.1149/2.042312jes
RT Journal T1 <Title>BEOL Cu CMP Process Evaluation for Advanced Technology Nodes</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.042312jes&Exemplar=1&LAN=DE A1 Tanwar, Kunaljeet A1 Canaperi, Donald A1 Lofaro, Michael A1 Tseng, Wei-tsu A1 Patlolla, Raghuveer A1 Penny, Christopher A1 Waskiewicz, Christopher PB The Electrochemical Society YR 2013 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 160 IS 12 SP D3247 OP D3254 LK http://dx.doi.org/https://doi.org/10.1149/2.042312jes DO https://doi.org/10.1149/2.042312jes SF ELIB - SuUB Bremen
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