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1 Ergebnisse
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Investigation of Cu/TaN and Co/TaN Barrier-Seed Oxidation b..:
Caillard, Louis
;
Vigneron, Jackie
;
Thiam, Mikailou
...
Journal of The Electrochemical Society. 165 (2018) 10 - p. D439-D443 , 2018
Link:
https://doi.org/10.1149/2.0761810jes
RT Journal T1 <Title>Investigation of Cu/TaN and Co/TaN Barrier-Seed Oxidation by Acidic and Alkaline Copper Electroplating Chemistry for Damascene Applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0761810jes&Exemplar=1&LAN=DE A1 Caillard, Louis A1 Vigneron, Jackie A1 Thiam, Mikailou A1 Lakhdari, Amine A1 Raynal, Frédéric A1 Etcheberry, Arnaud PB The Electrochemical Society YR 2018 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 165 IS 10 SP D439 OP D443 LK http://dx.doi.org/https://doi.org/10.1149/2.0761810jes DO https://doi.org/10.1149/2.0761810jes SF ELIB - SuUB Bremen
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