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1 Ergebnisse
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Metal∕Dielectric Liner Formation by a Simple Solution Proce..:
Ham, Yong-Hyun
;
Kim, Dong-Pyo
;
Baek, Kyu-Ha
...
Electrochemical and Solid-State Letters. 15 (2012) 5 - p. H145 , 2012
Link:
https://doi.org/10.1149/2.esl113678
RT Journal T1 <Title>Metal∕Dielectric Liner Formation by a Simple Solution Process for through Silicon via Interconnection</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.esl113678&Exemplar=1&LAN=DE A1 Ham, Yong-Hyun A1 Kim, Dong-Pyo A1 Baek, Kyu-Ha A1 Park, Kun-Sik A1 Kim, Moonkeun A1 Kwon, Kwang-Ho A1 Lee, Kijun A1 Do, Lee-Mi PB The Electrochemical Society YR 2012 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 15 IS 5 SP H145 LK http://dx.doi.org/https://doi.org/10.1149/2.esl113678 DO https://doi.org/10.1149/2.esl113678 SF ELIB - SuUB Bremen
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