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1 Ergebnisse
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Chemical Mechanical Planarization of Carbon-Doped Amorphous..:
Feng, Daohuan
;
Liu, Weili
;
Liu, Yuxiang
...
ECS Journal of Solid State Science and Technology. 9 (2020) 2 - p. 024007 , 2020
Link:
https://doi.org/10.1149/2162-8777/ab682d
RT Journal T1 <Title>Chemical Mechanical Planarization of Carbon-Doped Amorphous Ge2Sb2Te5 Film with Hydrogen Peroxide as Oxidizer in Alkaline Slurry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ab682d&Exemplar=1&LAN=DE A1 Feng, Daohuan A1 Liu, Weili A1 Liu, Yuxiang A1 Song, Zhitang A1 Wang, Weilei A1 Wei, Zhen A1 Zhao, Gaoyang PB The Electrochemical Society YR 2020 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 2 SP 024007 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ab682d DO https://doi.org/10.1149/2162-8777/ab682d SF ELIB - SuUB Bremen
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