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1 Ergebnisse
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Mass Transfer Limited KOH Etching in Crystalline Silicon us..:
Tjiptowidjojo, Kristianto
;
Han, Seok Jun
;
Han, Sang Eon
..
ECS Journal of Solid State Science and Technology. 9 (2020) 3 - p. 034013 , 2020
Link:
https://doi.org/10.1149/2162-8777/ab8063
RT Journal T1 <Title>Mass Transfer Limited KOH Etching in Crystalline Silicon using a Confinement Mask</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ab8063&Exemplar=1&LAN=DE A1 Tjiptowidjojo, Kristianto A1 Han, Seok Jun A1 Han, Sang Eon A1 Han, Sang M. A1 Schunk, P. Randall PB The Electrochemical Society YR 2020 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 3 SP 034013 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ab8063 DO https://doi.org/10.1149/2162-8777/ab8063 SF ELIB - SuUB Bremen
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