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1 Ergebnisse
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Tribological, Thermal and Kinetic Characterization of SiO2a..:
Mariscal, Juan Cristobal
;
McAllister, Jeffrey
;
Sampurno, Yasa
...
ECS Journal of Solid State Science and Technology. 9 (2020) 4 - p. 044008 , 2020
Link:
https://doi.org/10.1149/2162-8777/ab89bc
RT Journal T1
Tribological, Thermal and Kinetic Characterization of SiO2and Si3N4Polishing for STI CMP on Blanket and Patterned Wafers
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ab89bc&Exemplar=1&LAN=DE A1 Mariscal, Juan Cristobal A1 McAllister, Jeffrey A1 Sampurno, Yasa A1 Suarez, Jon Sierra A1 O'Neill, Mark A1 Zhou, Hongjun A1 Grief, Malcolm A1 Slutz, Dave A1 Philipossian, Ara PB The Electrochemical Society YR 2020 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 4 SP 044008 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ab89bc DO https://doi.org/10.1149/2162-8777/ab89bc SF ELIB - SuUB Bremen
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