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1 Ergebnisse
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Investigation of Effect of L-Aspartic Acid and H2O2 for Cob..:
Xu, Aoxue
;
Liu, Weili
;
Zhao, Gaoyang
...
ECS Journal of Solid State Science and Technology. 9 (2020) 4 - p. 044007 , 2020
Link:
https://doi.org/10.1149/2162-8777/ab8c1a
RT Journal T1 <Title>Investigation of Effect of L-Aspartic Acid and H2O2 for Cobalt Chemical Mechanical Polishing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ab8c1a&Exemplar=1&LAN=DE A1 Xu, Aoxue A1 Liu, Weili A1 Zhao, Gaoyang A1 Feng, Daohuan A1 Wang, Weilei A1 Song, Zhitang PB The Electrochemical Society YR 2020 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 4 SP 044007 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ab8c1a DO https://doi.org/10.1149/2162-8777/ab8c1a SF ELIB - SuUB Bremen
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