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1 Ergebnisse
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Characterization of Different Cobalt Surfaces and Interacti..:
Ryu, Heon-Yul
;
Lee, Chan-Hee
;
Hwang, Jun-Kil
...
ECS Journal of Solid State Science and Technology. 9 (2020) 6 - p. 064005 , 2020
Link:
https://doi.org/10.1149/2162-8777/aba331
RT Journal T1 <Title>Characterization of Different Cobalt Surfaces and Interactions with Benzotriazole for CMP Application</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_aba331&Exemplar=1&LAN=DE A1 Ryu, Heon-Yul A1 Lee, Chan-Hee A1 Hwang, Jun-Kil A1 Cho, Hwi-Won A1 Prasad, Nagendra Yerriboina A1 Kim, Tae-Gon A1 Hamada, Satomi A1 Park, Jin-Goo PB The Electrochemical Society YR 2020 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 6 SP 064005 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/aba331 DO https://doi.org/10.1149/2162-8777/aba331 SF ELIB - SuUB Bremen
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