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1 Ergebnisse
1
BCl3-Based Dry Etching of Exfoliated (100) ß-Ga2O3 Flakes:
Kim, Man-Kyung
;
Kim, Yukyung
;
Kim, Jihyun
..
ECS Journal of Solid State Science and Technology. 9 (2020) 7 - p. 075001 , 2020
Link:
https://doi.org/10.1149/2162-8777/abae14
RT Journal T1 <Title>BCl3-Based Dry Etching of Exfoliated (100) ß-Ga2O3 Flakes</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_abae14&Exemplar=1&LAN=DE A1 Kim, Man-Kyung A1 Kim, Yukyung A1 Kim, Jihyun A1 Baik, Kwang Hyeon A1 Jang, Soohwan PB The Electrochemical Society YR 2020 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 7 SP 075001 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/abae14 DO https://doi.org/10.1149/2162-8777/abae14 SF ELIB - SuUB Bremen
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