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1 Ergebnisse
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Process Co-Optimization of CVD and CMP for Tungsten Metalli..:
Pancharatnam, Shanti
;
Tseng, Wei-Tsu
;
Choi, Samuel
.
ECS Journal of Solid State Science and Technology. 9 (2020) 10 - p. 104004 , 2020
Link:
https://doi.org/10.1149/2162-8777/abbe9e
RT Journal T1 <Title>Process Co-Optimization of CVD and CMP for Tungsten Metallization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_abbe9e&Exemplar=1&LAN=DE A1 Pancharatnam, Shanti A1 Tseng, Wei-Tsu A1 Choi, Samuel A1 Johnson, Richard PB The Electrochemical Society YR 2020 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 10 SP 104004 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/abbe9e DO https://doi.org/10.1149/2162-8777/abbe9e SF ELIB - SuUB Bremen
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