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Contamination Mechanism of Ceria Particles on the Oxide Sur..:
Han, Kwang-Min
;
Han, So-Young
;
Sahir, Samrina
...
ECS Journal of Solid State Science and Technology. 9 (2020) 12 - p. 124004 , 2020
Link:
https://doi.org/10.1149/2162-8777/abcf13
RT Journal T1 <Title>Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_abcf13&Exemplar=1&LAN=DE A1 Han, Kwang-Min A1 Han, So-Young A1 Sahir, Samrina A1 Yerriboina, Nagendra Prasad A1 Kim, Tae-Gon A1 Mahadev, Niraj A1 Park, Jin-Goo PB The Electrochemical Society YR 2020 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 12 SP 124004 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/abcf13 DO https://doi.org/10.1149/2162-8777/abcf13 SF ELIB - SuUB Bremen
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