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1 Ergebnisse
1
Tribological, Thermal, Kinetic, and Pad Micro-Textural Stud..:
Philipossian, Ara
;
Sampurno, Yasa
;
Tustin, Michael
.
ECS Journal of Solid State Science and Technology. 9 (2020) 12 - p. 124002 , 2020
Link:
https://doi.org/10.1149/2162-8777/abd14b
RT Journal T1 <Title>Tribological, Thermal, Kinetic, and Pad Micro-Textural Studies Using Polyphenylene Sulfide Retaining Rings in Interlayer Dielectric Chemical Mechanical Planarization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_abd14b&Exemplar=1&LAN=DE A1 Philipossian, Ara A1 Sampurno, Yasa A1 Tustin, Michael A1 Schranner, Anton PB The Electrochemical Society YR 2020 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 9 IS 12 SP 124002 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/abd14b DO https://doi.org/10.1149/2162-8777/abd14b SF ELIB - SuUB Bremen
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