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Sublimation Anisotropic Etching of Silicon Carbide in Alumi..:
Argunova, T. S.
;
Kazarova, O. P.
;
Gutkin, M. Yu.
.
ECS Journal of Solid State Science and Technology. 10 (2021) 4 - p. 045008 , 2021
Link:
https://doi.org/10.1149/2162-8777/abf727
RT Journal T1 <Title>Sublimation Anisotropic Etching of Silicon Carbide in Aluminum Nitride Vapors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_abf727&Exemplar=1&LAN=DE A1 Argunova, T. S. A1 Kazarova, O. P. A1 Gutkin, M. Yu. A1 Mokhov, E. N. PB The Electrochemical Society YR 2021 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 10 IS 4 SP 045008 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/abf727 DO https://doi.org/10.1149/2162-8777/abf727 SF ELIB - SuUB Bremen
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