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1 Ergebnisse
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Investigation of Particle Kinetic Energy for EKF-CMP Proces:
Mai, Phuoc-Trai
;
Lu, Li-Shin
;
Chen, Chao-Chang A.
.
ECS Journal of Solid State Science and Technology. 10 (2021) 7 - p. 074007 , 2021
Link:
https://doi.org/10.1149/2162-8777/ac12b1
RT Journal T1 <Title>Investigation of Particle Kinetic Energy for EKF-CMP Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac12b1&Exemplar=1&LAN=DE A1 Mai, Phuoc-Trai A1 Lu, Li-Shin A1 Chen, Chao-Chang A. A1 Lin, and Yu-Ming PB The Electrochemical Society YR 2021 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 10 IS 7 SP 074007 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac12b1 DO https://doi.org/10.1149/2162-8777/ac12b1 SF ELIB - SuUB Bremen
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