I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Chemical Mechanical Polishing of TiN Film with Potassium Pe..:
Li, Chenghsing
;
Cai, Daolin
;
Feng, Daohuan
...
ECS Journal of Solid State Science and Technology. 10 (2021) 7 - p. 074009 , 2021
Link:
https://doi.org/10.1149/2162-8777/ac164d
RT Journal T1 <Title>Chemical Mechanical Polishing of TiN Film with Potassium Permanganate and L-Aspartic Acid in Alkaline Slurry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac164d&Exemplar=1&LAN=DE A1 Li, Chenghsing A1 Cai, Daolin A1 Feng, Daohuan A1 Cui, Zijing A1 Liu, Weili A1 Song, Zhitang PB The Electrochemical Society YR 2021 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 10 IS 7 SP 074009 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac164d DO https://doi.org/10.1149/2162-8777/ac164d SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
