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1 Ergebnisse
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Ceria-Based Abrasive Composite to Improve MRR of SiO2 in 3D..:
Zhaoxia, Yang
;
Zhang, Baoguo
;
Xiaofan, Yang
..
ECS Journal of Solid State Science and Technology. 10 (2021) 9 - p. 093005 , 2021
Link:
https://doi.org/10.1149/2162-8777/ac258a
RT Journal T1 <Title>Ceria-Based Abrasive Composite to Improve MRR of SiO2 in 3D-NAND</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac258a&Exemplar=1&LAN=DE A1 Zhaoxia, Yang A1 Zhang, Baoguo A1 Xiaofan, Yang A1 Ye, Li A1 Haoran, Li PB The Electrochemical Society YR 2021 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 10 IS 9 SP 093005 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac258a DO https://doi.org/10.1149/2162-8777/ac258a SF ELIB - SuUB Bremen
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