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1 Ergebnisse
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Effects of H2O2 and pH on the Chemical Mechanical Planariza..:
Ryu, Heon-Yul
;
Teugels, Lieve
;
Devriendt, Katia
...
ECS Journal of Solid State Science and Technology. 10 (2021) 9 - p. 094001 , 2021
Link:
https://doi.org/10.1149/2162-8777/ac26d3
RT Journal T1 <Title>Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac26d3&Exemplar=1&LAN=DE A1 Ryu, Heon-Yul A1 Teugels, Lieve A1 Devriendt, Katia A1 Struyf, Herbert A1 Kim, Tae-Gon A1 Park, Jin-Goo PB The Electrochemical Society YR 2021 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 10 IS 9 SP 094001 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac26d3 DO https://doi.org/10.1149/2162-8777/ac26d3 SF ELIB - SuUB Bremen
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