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1 Ergebnisse
1
Effect of Particle Size and pH Value of Slurry on Chemical ..:
Xu, Fan
;
Wang, Weilei
;
Xu, Aoxue
...
ECS Journal of Solid State Science and Technology. 11 (2022) 1 - p. 013004 , 2022
Link:
https://doi.org/10.1149/2162-8777/ac495f
RT Journal T1 <Title>Effect of Particle Size and pH Value of Slurry on Chemical Mechanical Polishing of SiO2 Film</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac495f&Exemplar=1&LAN=DE A1 Xu, Fan A1 Wang, Weilei A1 Xu, Aoxue A1 Feng, Daohuan A1 Liu, Weili A1 Song, Zhitang PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 1 SP 013004 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac495f DO https://doi.org/10.1149/2162-8777/ac495f SF ELIB - SuUB Bremen
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