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Quasi In Situ XPS on a SiOxFy Layer Deposited on Silicon by..:

Antoun, G. ; Girard, A. ; Tillocher, T....
ECS Journal of Solid State Science and Technology.  11 (2022)  1 - p. 013013 , 2022
Link: https://doi.org/10.1149/2162-8777/ac4c7d