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1 Ergebnisse
1
Effect of Alkali Metal Ion on Chemical Mechanical Polishing..:
Ye, Li
;
Baoguo, Zhang
;
Li Haoran, Z.
...
ECS Journal of Solid State Science and Technology. 11 (2022) 3 - p. 034003 , 2022
Link:
https://doi.org/10.1149/2162-8777/ac5474
RT Journal T1 <Title>Effect of Alkali Metal Ion on Chemical Mechanical Polishing of LiTaO3</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac5474&Exemplar=1&LAN=DE A1 Ye, Li A1 Baoguo, Zhang A1 Li Haoran, Z. A1 Pengfei, Wu A1 Ye, Wang A1 Mengchen, Xie PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 3 SP 034003 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac5474 DO https://doi.org/10.1149/2162-8777/ac5474 SF ELIB - SuUB Bremen
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