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Post-metallization annealing and photolithography effects i..:

Ioannou-Sougleridis, V. ; Alafakis, S. ; Pécz, B....
ECS Journal of Solid State Science and Technology.  11 (2022)  4 - p. 045006 , 2022
Link: https://doi.org/10.1149/2162-8777/ac62f2