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1 Ergebnisse
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Source/Drain Activation for Flexible Poly-Si Nanoscale pFET..:
Hou, Po-Cheng
;
Huang, Wen-Hsien
;
Kao, Ming-Hsuan
...
ECS Journal of Solid State Science and Technology. 11 (2022) 6 - p. 065007 , 2022
Link:
https://doi.org/10.1149/2162-8777/ac760c
RT Journal T1 <Title>Source/Drain Activation for Flexible Poly-Si Nanoscale pFETs with a Laser-Buffer Layer by CO2 laser Annealing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac760c&Exemplar=1&LAN=DE A1 Hou, Po-Cheng A1 Huang, Wen-Hsien A1 Kao, Ming-Hsuan A1 Wang, Hsing-Hsiang A1 Shieh, Jia-Min A1 Shen, Chang-Hong A1 Pan, Fu-Ming A1 Chang, Li PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 6 SP 065007 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac760c DO https://doi.org/10.1149/2162-8777/ac760c SF ELIB - SuUB Bremen
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