I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Water Flow Improvement by Pinhole Outlet in Batch-Type Wet ..:
Tsuchida, Toko
;
Takahashi, Toshinori
;
Habuka, Hitoshi
.
ECS Journal of Solid State Science and Technology. 11 (2022) 7 - p. 074001 , 2022
Link:
https://doi.org/10.1149/2162-8777/ac7bf0
RT Journal T1 <Title>Water Flow Improvement by Pinhole Outlet in Batch-Type Wet Cleaning Bath for Large-Diameter Wafers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac7bf0&Exemplar=1&LAN=DE A1 Tsuchida, Toko A1 Takahashi, Toshinori A1 Habuka, Hitoshi A1 Goto, Akihiro PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 7 SP 074001 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac7bf0 DO https://doi.org/10.1149/2162-8777/ac7bf0 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
