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Perspective—Recent Advances and Thoughts on Ceria Particle ..:
Seo, Jihoon
;
Kim, Kijung
;
Kang, Hyungoo
.
ECS Journal of Solid State Science and Technology. 11 (2022) 8 - p. 084003 , 2022
Link:
https://doi.org/10.1149/2162-8777/ac8310
RT Journal T1 <Title>Perspective—Recent Advances and Thoughts on Ceria Particle Applications in Chemical Mechanical Planarization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac8310&Exemplar=1&LAN=DE A1 Seo, Jihoon A1 Kim, Kijung A1 Kang, Hyungoo A1 Babu, S.V. PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 8 SP 084003 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac8310 DO https://doi.org/10.1149/2162-8777/ac8310 SF ELIB - SuUB Bremen
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