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1 Ergebnisse
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Surface Planarization of CdZnTe Wafers: Effect of Slurry Fo..:
Qasim, Mohd
;
Parthiban, P.
;
Das, D.
ECS Journal of Solid State Science and Technology. 11 (2022) 8 - p. 084008 , 2022
Link:
https://doi.org/10.1149/2162-8777/ac8b35
RT Journal T1 <Title>Surface Planarization of CdZnTe Wafers: Effect of Slurry Formulation and CMP Processing Parameters on Surface Planarity</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ac8b35&Exemplar=1&LAN=DE A1 Qasim, Mohd A1 Parthiban, P. A1 Das, D. PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 8 SP 084008 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ac8b35 DO https://doi.org/10.1149/2162-8777/ac8b35 SF ELIB - SuUB Bremen
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