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1 Ergebnisse
1
Low-Temperature Epitaxial Growth by Quiescent Plasma-Enhanc..:
Song, Chang-Hun
;
Ryu, Hwa-Yeon
;
Oh, Hoonjung
..
ECS Journal of Solid State Science and Technology. 11 (2022) 12 - p. 123009 , 2022
Link:
https://doi.org/10.1149/2162-8777/acabe4
RT Journal T1 <Title>Low-Temperature Epitaxial Growth by Quiescent Plasma-Enhanced Chemical Vapor Deposition at Atmospheric Pressure</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_acabe4&Exemplar=1&LAN=DE A1 Song, Chang-Hun A1 Ryu, Hwa-Yeon A1 Oh, Hoonjung A1 Baik, Seung Jae A1 Ko, Dae-Hong PB The Electrochemical Society YR 2022 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 11 IS 12 SP 123009 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/acabe4 DO https://doi.org/10.1149/2162-8777/acabe4 SF ELIB - SuUB Bremen
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