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1 Ergebnisse
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Real-Time Prediction of Removal Rate and Friction Coefficie..:
Uneda, Michio
;
Ota, Shunpei
;
Takiguchi, Shunsuke
...
ECS Journal of Solid State Science and Technology. 12 (2023) 1 - p. 014002 , 2023
Link:
https://doi.org/10.1149/2162-8777/acaeb5
RT Journal T1 <Title>Real-Time Prediction of Removal Rate and Friction Coefficient During Chemical Mechanical Polishing Using Motor Load Currents with a Polisher</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_acaeb5&Exemplar=1&LAN=DE A1 Uneda, Michio A1 Ota, Shunpei A1 Takiguchi, Shunsuke A1 Yamamoto, Yuko A1 Miyashita, Tadakazu A1 Ishikawa, Ken-ichi PB The Electrochemical Society YR 2023 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 12 IS 1 SP 014002 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/acaeb5 DO https://doi.org/10.1149/2162-8777/acaeb5 SF ELIB - SuUB Bremen
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