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1 Ergebnisse
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Investigation on the Processing Quality of Nanosecond Laser..:
Song, Qi
;
Zhang, Zhe
;
Xu, Ziye
...
ECS Journal of Solid State Science and Technology. 12 (2023) 3 - p. 033012 , 2023
Link:
https://doi.org/10.1149/2162-8777/acc135
RT Journal T1 <Title>Investigation on the Processing Quality of Nanosecond Laser Stealth Dicing for 4H-SiC Wafer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_acc135&Exemplar=1&LAN=DE A1 Song, Qi A1 Zhang, Zhe A1 Xu, Ziye A1 Wen, Zhidong A1 Shi, Haiyan A1 Zhang, Kunpeng A1 Li, Man A1 Zhang, Zichen A1 Hou, Yu A1 Song, Zhengxun PB The Electrochemical Society YR 2023 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 12 IS 3 SP 033012 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/acc135 DO https://doi.org/10.1149/2162-8777/acc135 SF ELIB - SuUB Bremen
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