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Hot Carrier Injection Reliability of Fabricated N- and P-Ty..:
Chen, Yu-Lin
;
Yeh, Wen-Kuan
;
Hsu, Heng-Tung
...
ECS Journal of Solid State Science and Technology. 12 (2023) 3 - p. 035007 , 2023
Link:
https://doi.org/10.1149/2162-8777/acc138
RT Journal T1 <Title>Hot Carrier Injection Reliability of Fabricated N- and P-Type Multi FinFETs with Different TiN Stacks</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_acc138&Exemplar=1&LAN=DE A1 Chen, Yu-Lin A1 Yeh, Wen-Kuan A1 Hsu, Heng-Tung A1 Chen, Ke-Horng A1 Lin, Wen-Chin A1 Yu, Tien-Han A1 Chou, Hung-Ting A1 Godwin Raj, D A1 Godfrey, D PB The Electrochemical Society YR 2023 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 12 IS 3 SP 035007 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/acc138 DO https://doi.org/10.1149/2162-8777/acc138 SF ELIB - SuUB Bremen
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