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1 Ergebnisse
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Multi-Scale Insight into Inhibition Mechanism of Benzo Deri..:
Liu, Jianghao
;
Niu, Xinhuan
;
Zhan, Ni
...
ECS Journal of Solid State Science and Technology. 12 (2023) 8 - p. 084002 , 2023
Link:
https://doi.org/10.1149/2162-8777/acec99
RT Journal T1 <Title>Multi-Scale Insight into Inhibition Mechanism of Benzo Derivatives in Chemical Mechanical Polishing of Copper Film Based on Experiments and Theoretical Calculations</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_acec99&Exemplar=1&LAN=DE A1 Liu, Jianghao A1 Niu, Xinhuan A1 Zhan, Ni A1 Zou, Yida A1 Yan, Han A1 Qu, Minghui A1 Luo, Fu A1 Shi, Yunhui PB The Electrochemical Society YR 2023 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 12 IS 8 SP 084002 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/acec99 DO https://doi.org/10.1149/2162-8777/acec99 SF ELIB - SuUB Bremen
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