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1 Ergebnisse
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Optimization and Mechanism of SiO2-Based Slurry Components ..:
Xian, Wenhao
;
Zhang, Baoguo
;
Liu, Min
...
ECS Journal of Solid State Science and Technology. 13 (2024) 1 - p. 014003 , 2024
Link:
https://doi.org/10.1149/2162-8777/ad1c89
RT Journal T1 <Title>Optimization and Mechanism of SiO2-Based Slurry Components for Atomically Smooth Gallium Nitride Surface Obtained Using Chemical Mechanical Polishing Technique</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ad1c89&Exemplar=1&LAN=DE A1 Xian, Wenhao A1 Zhang, Baoguo A1 Liu, Min A1 Wu, Pengfei A1 Wang, Ye A1 Liu, Shitong A1 Cui, Dexing PB The Electrochemical Society YR 2024 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 13 IS 1 SP 014003 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ad1c89 DO https://doi.org/10.1149/2162-8777/ad1c89 SF ELIB - SuUB Bremen
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