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1 Ergebnisse
1
Chemical Mechanical Polishing for Monocrystal SiC Assisted ..:
Shi, Dong
;
Yin, Tao
;
Feng, Kaiping
.
ECS Journal of Solid State Science and Technology. 13 (2024) 3 - p. 034001 , 2024
Link:
https://doi.org/10.1149/2162-8777/ad2cfd
RT Journal T1 <Title>Chemical Mechanical Polishing for Monocrystal SiC Assisted by the Heterogeneous Sono-Fenton Oxidation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ad2cfd&Exemplar=1&LAN=DE A1 Shi, Dong A1 Yin, Tao A1 Feng, Kaiping A1 Zhao, Tianchen PB The Electrochemical Society YR 2024 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 13 IS 3 SP 034001 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ad2cfd DO https://doi.org/10.1149/2162-8777/ad2cfd SF ELIB - SuUB Bremen
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