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1 Ergebnisse
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Development of Ge Isotropic Wet Etching Solution and its Ap..:
Shimizu, Noboru
;
Wang, Dong
;
Nakashima, Hiroshi
.
ECS Journal of Solid State Science and Technology. 13 (2024) 4 - p. 044001 , 2024
Link:
https://doi.org/10.1149/2162-8777/ad384b
RT Journal T1 <Title>Development of Ge Isotropic Wet Etching Solution and its Application to High Quality Ge-on-Insulator Fabrication through the Etchback Method</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ad384b&Exemplar=1&LAN=DE A1 Shimizu, Noboru A1 Wang, Dong A1 Nakashima, Hiroshi A1 Yamamoto, Keisuke PB The Electrochemical Society YR 2024 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 13 IS 4 SP 044001 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ad384b DO https://doi.org/10.1149/2162-8777/ad384b SF ELIB - SuUB Bremen
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