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1 Ergebnisse
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Effect of Novel pH Regulators on Copper film Chemical Mecha..:
Dong, Changxin
;
Niu, Xinhuan
;
Liu, Jianghao
...
ECS Journal of Solid State Science and Technology. 13 (2024) 5 - p. 054001 , 2024
Link:
https://doi.org/10.1149/2162-8777/ad4679
RT Journal T1 <Title>Effect of Novel pH Regulators on Copper film Chemical Mechanical Polishing for Ruthenium-Based Copper Interconnect under Weak Alkalinity Conditions</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ad4679&Exemplar=1&LAN=DE A1 Dong, Changxin A1 Niu, Xinhuan A1 Liu, Jianghao A1 Zhan, Ni A1 Zou, Yida A1 He, Chao A1 Li, Xinjie A1 Luo, Fu A1 Shi, Yunhui A1 Cheng, Jiabao PB The Electrochemical Society YR 2024 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 13 IS 5 SP 054001 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ad4679 DO https://doi.org/10.1149/2162-8777/ad4679 SF ELIB - SuUB Bremen
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