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1 Ergebnisse
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Effect of Potassium Ferrocyanide on CMP Performance of Ruth..:
Liu, Renhao
;
Xu, Yi
;
Liu, Yuling
...
ECS Journal of Solid State Science and Technology. 13 (2024) 6 - p. 064002 , 2024
Link:
https://doi.org/10.1149/2162-8777/ad4fbe
RT Journal T1 <Title>Effect of Potassium Ferrocyanide on CMP Performance of Ruthenium in H2O2-based Slurries</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2162-8777_ad4fbe&Exemplar=1&LAN=DE A1 Liu, Renhao A1 Xu, Yi A1 Liu, Yuling A1 Tan, Baimei A1 Ji, Jinbo A1 Zhang, Shihao A1 Zhao, Jiadong PB The Electrochemical Society YR 2024 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 13 IS 6 SP 064002 LK http://dx.doi.org/https://doi.org/10.1149/2162-8777/ad4fbe DO https://doi.org/10.1149/2162-8777/ad4fbe SF ELIB - SuUB Bremen
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