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On MEMS Reliability and Failure Mechanisms:
Fonseca, Daniel J.
;
Sequera, Miguel
;
Bae, Suk joo
Journal of Quality and Reliability Engineering. 2011 (2011) 1 - p. , 2011
Link:
https://doi.org/10.1155/2011/820243
RT Journal T1 <Title>On MEMS Reliability and Failure Mechanisms</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1155_2011_820243&Exemplar=1&LAN=DE A1 Fonseca, Daniel J. A1 Sequera, Miguel A1 Bae, Suk joo PB Wiley YR 2011 SN 2314-8055 SN 2314-8047 JF Journal of Quality and Reliability Engineering VO 2011 IS 1 LK http://dx.doi.org/https://doi.org/10.1155/2011/820243 DO https://doi.org/10.1155/2011/820243 SF ELIB - SuUB Bremen
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